Handbook of Silicon Semiconductor Metrology
K. Krishnamoorthy
A complete reference on silicon semiconductor metrology. Contains nearly 1300 references, more than 300 equations, and nearly 500 drawings, photographs and micrographs. Explains run-to-run and real-time control, considers how to improve physical measurement methods to meet more exact requirements, and more.
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The book removed at the request of the copyright holder.
