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An Introduction to Microelectromechanical Systems Engineering

Обложка книги An Introduction to Microelectromechanical Systems Engineering

An Introduction to Microelectromechanical Systems Engineering

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I have an interest in MEMS sensors and R&D efforts in such sensors, but little background in semiconductor processes. This book was a quick and painless introduction to the MEMS field from end to end. Complements and introduces the "handbooks" and their contents rather well.
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